Manufacturing thin ionic polymer metal composite for sensing at the microscale

Abstract Ionic polymer metal composites (IPMCs) are a class of materials with rising appeal in biological micro-electromechanical systems (bio-MEMS) due to their unique properties (low voltage output, bio-compatibility, affinity ionic medium). While tailoring and improving actuation capabilities IPMCs is key motivator almost all IPMC manufacturing reports, very little efforts have been dedicated sensing using thinner than 100 µ m. Most reports on utilization rely 180 m-thick Nafion platinum electrodes, too stiff for bio-MEMS applications. The same fabrication process membranes does yield poor electrodes performance, needs be studied increase flexibility sensitivity the microscale range. This study demonstrates an electroless Pt deposition method fabricating bio-MEMS-suitable 50 samples. First, we perform comparative distribution within backbone as well surface standard recipe thin (50 m) thick (180 Nafion. We report strong differences that experienced process. By varying chemical concentrations from obtain convenient Nafion, mainly localized proximity surface, lower sheet resistance. could measure flexural rigidity 3.43 × 10 − 8 N·m 2 , 46 times IPMC. calculated 0.476 ± 0.02 mV mm −1 limit detection our sensor 500 20 procedure sets milestone transducers sensors